| CARVIEW |
- ???c???̃X?g???[?W?ʐM
- ???c???̃f?o?C?X?ʐM
- ???V?㗲?̃i?m?t?H?[?J?X
- ??R???̋ƊE?X?R?[?v
- ?匴?Y??̃G???E?g?ݍ??݃v???C?o?b?N
- ???^?C?A???O?G???W?j?A?̎Љ?l??w?Y???L
- ???E???u?????v?ʼnĂ݂悤
- ?x??o?Y???[?h ?`Behind the Buzzword
- ????10?N?ŋN?????????ƁA????10?N?ŋN???邱??
- ???i?????ŒT??A?W?A?̐V?g?????h
- ???`???Z?p??m??
- ?g?ْ[???G???W?j?A?h???d?|?????Г????v?A???O??180??
- ?C?m?x?[?V?????͓??{???~???̂?
- JASA??IoT?ʐM
- IHS?A?i???X?g?u?????W?]?v
- ?u?p??Ɉ?????Ȃ??G???W?j?A?v?̂??߂̐V?s???_
?w???E?????B??~?\?\AI?u?[?????????u?????Ȃ??ՊE?_?v?i?O?ҁj?F???V?㗲?̃i?m?t?H?[?J?X?i89-1?j?i1/6 ?y?[?W?j
?č??ƃC?X???G???ɂ??C?????U???ɒ[???????????́A?????̋ƊE?ɂ?????ȉe?????????炷?B???̍ł?????̂??w???E???iHe?j?̋?????~???B?{?e?ł́A?w???E?????B??~???????̋ƊE?ɗ^????e????O??҂ɕ????ďڍׂɉ???A?l?@????B?y????????z
?J?^?[????LNG?{?ݒ?~??He??????3????????
?@2026?N3???A?J?^?[???̉t???V?R?K?X?iLNG?j?{?ݒ?~?ɂ?萢?E?̃w???E???iHe?j??????33?????????????B?w???E???͐Ód?`???b?N?iESC?j?Ƃ????E?G?n?X?e?[?W???g???h???C?G?b?`???O???u?ɂ????Ă̓E?G?n?[???ʗ?p??S???B?ꖳ??̔M????K?X?ł???A???̓r??́u??????ቺ?v?ł͂Ȃ??u?v???Z?X?????s?\?v???Ӗ?????B
?@3D NAND?^?t???b?V?????????̋ɒቷ?G?b?`???O?A?L?ш惁?????iHBM?j?̃V???R???ђʓd?ɁiTSV?j?`???AGAA?iGate-All-Around?j?̃i?m?V?[?g?`???ɂ????鍂?I???v???Y?}?G?b?`???O??v???Y?}?ɂ??\?ʏ????Ƃ??????H???ȂǁA??[?E???n???킸?????̐????̑S?̈悪?e??????B?؍??????????[?J?[??He?ɂ?5?J?????ATSMC??He?s???Ɠd?͐???̓?d??ɒ??ʂ???B?Y?ƃK?X?????҂??甼???̃??[?J?[?AAI?`?b?v?x???_?[?A?n?C?p?[?X?P?[???[?ւƘA??????t?H?[?X?E?}?W???[???i?s?R?͏????j?́A?N??3000???ăh??????AI?C???t?????????I?Ɏ??s?s?\?ɂ????˂Ȃ??BAI?u?[???̍ő?̃??X?N?͓d?͂ł????v???ނł??Ȃ??B?????̂??u????Ȃ??Ȃ?v???Ƃ??̂??̂ł???B
??1?́F????????????N???????u?w???E???V???b?N?v
?@??????̋ٔ????ɔ????A?z?????Y?C???̕??????X?N???????̂??̂ƂȂ????B????ɔ????ALNG????т??̕??Y???ł???He?̒??B??????ɂȂ????B
?@2026?N3???ȍ~?A???C?^?[?ʐM????{?o?ϐV???Ȃǂ̕????̕ɂ??A?J?^?[????LNG?֘A?{?݂͌R???I?e?????A???Y?E?A?o?̑o???ɐ[???Ȏx?Ⴊ?????Ă???BHe??LNG?????ߒ??̕??Y???ł??邽?߁ALNG?̐??Y??~??He?????̐???ɒ???????B
?@?č??̎Y?ƃK?X???Airgas?Ёi??Air Liquide?P???j??2026?N3??17???Ƀt?H?[?X?E?}?W???[???i?s?R?͏????j??錾???Ă???A?J?^?[???R????He???????????I?ɒ?~??Ԃɂ??邱?Ƃ𗠕t???Ă???B
?@2026?N4??1???t?̓??{?o?ϐV???ɂ??A2025?N?̐??E??He???Y?V?F?A?́A?č?43???A?J?^?[??33???A???V?A9???A?A???W?F???A6???Ƃ????i?}1?j?B???̂????J?^?[???̋??????傫???ʑ????????Ƃɂ??A?P???v?Z?ł????E?????̖?3????1??????ꂽ?ɓ??????ƂȂ??Ă???B
?@???????d?v?Ȃ̂́A???̋????????P?Ȃ?u???ʕs???v?ɂƂǂ܂?Ȃ??_?ł???BHe?͑?ւ??ɂ߂ē???A??????n??ɐ??Y???W?????A????ɋɒቷ?A???Ƃ???????ȕ????C???t???Ɉˑ????Ă???B?????̓r??̓T?v???C?`?F?[???S?̂̋@?\?s?S?ւƒ???????B
?}1?@2025?N?ɂ?????w???E?????Y?ʂ̐??E?V?F?A?m?N???b?N?Ŋg??n ?o???F???{?o?ϐV???A2026?N4??1???A?d?q?ŁA?o???́u?Ēn?????????iUSGS?j?v?Ȃ??w???E????????قǏd?v?Ȃ̂?
?@He?͕??_???|269???Ƌɂ߂ĒႭ?A?????M?`?????A???w?I?s?????A?ɂ߂ď????Ȍ??q???a?????B?????̓???????A??ÁiMRI?̒??`?????Η?p?j?A?F???i???P?b?g?R???^???N?̃p?[?W?j?A?????̐????i?E?G?n?[???x????A?p?[?W?K?X?j?ȂǕ??L???Y?Ƃŕs???Ȏ????ƂȂ??Ă???B???????????̐????ɂ????ẮA???̖????͒P?Ȃ?ޗ??ł͂Ȃ??A?u?v???Z?X?????????v?ɋ߂??Ӗ??????B
?@?????̐??????u?ɂ?????He?́A?h???C?G?b?`???O???u?A???w?C???????iCVD?j???u?A?ɒ[???O???iEUV?j?I?????u?ȂǂŎg?p?????B???̒??ł??????r??̉e?????ł??[???Ȃ̂??h???C?G?b?`???O?H?????B
?@?h???C?G?b?`???O???u?ł́A?v???Y?}?ɂ???ĉ??M?????E?G?n?[?̉??x??He?K?X?ɂ???Đ????ɐ??䂵?Ă???A???̋@?\???@?\???Ȃ???G?b?`???O?v???Z?X???̂??̂????????Ȃ??BEUV?I?????u?ɂ?????He?????r??̉e???ɂ??Ă??ʓr???͂?i?߂Ă??邪?A?{?e?ł͂܂??A?M?҂̐??ł???h???C?G?b?`???O???u?ɏœ_?Ă?i?Ȃ??A???̌?̗L???҂ւ̒????ɂ??EUV?I?????u?ɂ?????He?͕K?{?̃K?X?ł͂Ȃ??Ǝf?????B????ŁA?h???C?G?b?`???O???u?Ɠ??l?ɁA???`?N???̃X?e?[?W?Ƃ??Ďg????Ód?`???b?N?̉??x?????He???K?v?Ƃ???????????B?????āACVD???u?ɂ????Ă̓L?????A?K?X?Ƃ???He???g???Ă???͗l?????A????????????_?ŏڍׂ?c???ł??Ă??Ȃ??̂ŁA????s?Ӓ?????i?߂邱?ƂƂ???j
?@?????ŁAHe?̋??????͓???̐?[?v???Z?X?????̘b?ł͂Ȃ??B?h???C?G?b?`???O?̓m?[?h?̐????f?o?C?X?̎?ނ??킸?g?p??????H???ł???AHe?????̓r??͐??E?̔????̐????S?̂̍?????h?邪???B
?@???͂ł́A?h???C?G?b?`???O?ɂ?????E?G?n?[???x????̎d?g?݂???????A?Ȃ?He???Z?p?I?ɑ?֕s?\?Ȃ̂??𖾂炩?ɂ???B
??2?́F?h???C?G?b?`???O???u?̉??x????̌???
?@?h???C?G?b?`???O?Z?p?ɂ????āA?E?G?n?[?̉??x????͏?ɏd?v?ȗv?f?ł????????A???????i?݁A?ŏ????H???@?iCritical Dimension?ACD?j????Ƀi?m???[?g???inm?j?I?[?_?[?̐??x?????߂???悤?ɂȂ??????݁A???̏d?v???͂??ĂȂ??قǍ??܂??Ă???B?{?͂ł́A?h???C?G?b?`???O???u?ɂ????鉷?x????̎d?g?݂??A?}2??p???ĉ??????B
?}2?F?h???C?G?b?`???O???u?ɂ????鉷?x????̌????m?N???b?N?Ŋg??n ?o???F??K??j?iNanotech Research?j?@?w?͂??߂Ă̔????̃h???C?G?b?`???O?Z?p?x?i?Z?p?]?_?Ёj?A90?y?[?W?̐}4-162-1?j?v???Y?}????̓??M?Ɖ??x?㏸
?@?h???C?G?b?`???O???ɂ́A?v???Y?}????̕??˔M?ɉ????A?C?I???E???????W?J???E?d?q?̓??˂?e??g???̎??O???Ǝ˂???āA?E?G?n?[?ɔM??????????B???̓??M?ɑ??ĉ???[?u???u???Ȃ???A?E?G?n?[???x?͍ی??Ȃ??㏸???A?G?b?`???O???x?i?G?b?`???[?g?j??I???A?p?^?[???`??Ƃ??????G?b?`???O??????????s?\?ƂȂ?B????ɁA?????G?b?`???O?????̃E?G?n?[?ʓ??ψꐫ?????Ȃ???B
2-2?j?`???[?ɂ??Ód?`???b?N?̉??x????
?@?????ŁA?`???[?i?????z???u?j?ɂ???ĉ??x???䂳?ꂽ??}???A?E?G?n?[?̃X?e?[?W?ƂȂ?Ód?`???b?N?iElectrostatic Chuck?AESC?j?????̗??H?ɏz?????AESC???̂̉??x??ڕW?l?Ɉێ????Ă???B
2-3?jHe?ɂ?闠?ʗ?p
?@???????AESC?ƃE?G?n?[?̊Ԃɂ͔??ׂȌ??ԁi???\??m???x?j?????݂??A?????I?ڐG?????ł͏\???ȔM?`?B???????Ȃ??B?????ŁA???̌??Ԃ?He?K?X?𐔁`???\Torr?̈??͂œ??????A?C?̔M?`???ɂ???ăE?G?n?[????ESC?ւ̔M?A????⏕???Ă???i?}2?̉E??̐}?j?B
?@He???I??闝?R?́A???̕????I?????ɂ???BHe?͒P???q???q?ł???A???q?ʂ?4?Ƌɂ߂ď????????߁A???????x?ł????q?^?????x??N2??Ar???i?i?ɑ????B?????āA?C?̂̔M?`?????͕??q?^?????x?ɔ?Ⴗ?邽?߁AHe?̔M?`?????͏퉷?Ŗ?0.15 W/(m?EK)?ƁAN2?i??0.026 W/(m?EK)?j?̖?6?{?AAr?i??0.018 W/(m?EK)?j?̖?8?{?ɒB????B
?@?????āAHe?͉??w?I?Ɋ??S?ȕs?????K?X?ł???A?v???Y?}?????ł??E?G?n?[??ESC?\?ʂƔ??????Ȃ??B???́u?????M?`?????v?Ɓu???w?I?s?????v?̑g?ݍ??킹???AHe?𗠖ʗ?p?K?X?Ƃ??đ?֕s?\?ȑ??݂ɂ??Ă???B
2-4?j?L?????x?ш?ւ̑Ή?
?@?Ȃ??A?h???C?G?b?`???O???u?ɂ????鉷?x?ш?͋ɂ߂čL???BSiO2??SiN?Ȃǂ̐≏???G?b?`???O?H???ł?100???߂????????p??????ꍇ?????????A3D NAND?̍??A?X?y?N?g??G?b?`???O?ł́|60?`?|80???̋ɒቷ?i?N???C?I?G?b?`???O?j???̗p????Ă???B
?@?܂??AW?ATiN?AAl?ATa?A?|??Si?Ȃǂ̓??d???̃h???C?G?b?`???O?ł́A?ޗ????ƂɍœK???x?͈قȂ???̂́A?????ނ?20?`80???͈̔͂ɐ??䂳???B???????A??????̉??x?ш?ɂ????Ă??{???I?ɏd?v?Ȃ̂́A?E?G?n?[?ʓ??̉??x?ψꐫ???}1???ȉ??Ɉێ????邱?Ƃł???A??????x???Ă???̂?He??p?ł???B
2-5?jHe?́u???Օi?v?Ƃ??Ďg???̂Ă???Ă???
?@?????Œ??ӂ??ׂ??́A???ʗ?p?Ɏg?p???ꂽHe??????E?z???ꂸ?A???̂܂ܔr?C?????_?ł???BESC?ƃE?G?n?[?̌??Ԃ???R??o????He?́A?`?????o?[???̃v???Z?X?K?X????уG?b?`???O?ɂ???Đ????????????????ƍ???????A?^?[?{???q?|???v?Ȃǂ̐^??|???v????Ĕr?C?????B
?@?????āA?r?C????He?Z?x?͒Ⴍ?A?v???Z?X?K?X?Ƃ̕????E?????ɂ̓R?X?g???|???邽?߁A?????̔????̍H??ł?He????????̏??Օi?Ƃ??Ĉ????Ă???B???́u?g???̂āv?̍\?????A?h???C?G?b?`???O???u??He????ʂ??????グ?Ă???B
2-6?jHe?r?₪?Ӗ????????
?@?ȏォ?疾?炩?Ȃ悤?ɁAHe?͒P?Ȃ?⏕?K?X?ł͂Ȃ??A?h???C?G?b?`???O???u?ɂ?????u?M????C???t???v???̂??̂ł???B???̂??Ƃ̏d?傳?́AHe???????r?₵???ꍇ??z?肷??Ɩ??m?ɂȂ?B
- ???ʗ?pHe?K?X???Ȃ??Ȃ?ƁA?E?G?n?[??ESC?Ԃ̔M?`?B?????͑啝?ɒቺ????B
- ?v???Y?}????̓??M???\???ɔr?M?ł??Ȃ??Ȃ?A?E?G?n?[???x?͏㏸???A???ʓ??̉??x?ψꐫ????????????????B
- ?G?b?`???O???x??I???Ȃǂ̃G?b?`???O?????͉??x?ɑ傫???ˑ????邽?߁A?ʓ??̉??x?s?ψ??CD?̂???ɒ???????B
- ??[?v???Z?X?ł?nm?I?[?_?[??CD???䂪???߂??Ă???AHe?Ȃ??ł??̐??x???ێ????邱?Ƃ͎?????s?\?ł???B????͐??\?́u?ቺ?v?ł͂Ȃ??A?v???Z?X?́u?????s?\?v???Ӗ?????B
?@???̂悤?ɁA?h???C?G?b?`???O???u?ɂ????āA???͂?He?͕K?v?s???ȃK?X?ł???AHe?Ȃ??ł̓h???C?G?b?`???O?H???????????Ȃ??ƌ????Ă??ߌ??ł͂Ȃ??B
Copyright © ITmedia, Inc. All Rights Reserved.
?L???????L???O
- ???{???????卑?ց@?????ʂ???????Ȃ??A?쒹?????A?A?[?X?D?̉??l
- AI?????̂̎??v?}???@TSMC?͑Ή??ɋꗶ??
- ?u???????͂܂??܂?????Ȃ??v?@NASDAQ????SK?A?????ȓ????ӗ~
- AI???v?ŃV???R???t?H?g?j?N?X?Ɂu300mm?E?G?n?[???v?̔g
- ???{???{?̉Ȋw?Z?p?E?C?m?x?[?V????????
- ASML?AEUV?I?????u?̐??Y?\?͂?27?N??28?N??30??????
- ?O?H?d?@?ƃ\?j?[?AAI?r?W?????Z???T?[?ŐV??Аݗ???
- ?p???[?????̊?ƃ????L???O?A???{???͎O?H?d?@??5?Ђ??g?b?v20????
- ??????MRAM?J???Ɍ??????v?w?j?????A??????
- ?u?t?B?W?J??AI?͓??{??????? ?????????ׂ??vNVIDIA CEO??
RSS?t?B?[?h
EE Times Japan?ɂ???
??????j???[
EE Times ?C?O?l?b?g???[?N
?C?O??g?T?C?g
All material on this site Copyright © ITmedia, Inc. All Rights Reserved.
This site contains articles under license from AspenCore LLC.
ITmedia?̓A?C?e?B???f?B?A??????Ђ̓o?^???W?ł??B
???f?B?A?ꗗ | ????SNS | ?L???ē? | ???₢???킹 | ?v???C?o?V?[?|???V?[ | RSS | ?^?c??? | ?̗p??? | ??????