?f?B?X?R?A?u?؂?A???A?????v?H???̌?????????FSEMICON Japan 2018

?E?G?n?[?????p?̃??[???????ݑ??u?㕔??Ԃɐݒu

?@?f?B?X?R?́A?uSEMICON Japan 2018?v?i2018?N12??12?`14???A?????r?b?O?T?C?g?j?ŁA??H???̎??????A??ƌ????̉??P?Ɍ??????u??????H?????V?X?e??ver.2?v??A?X?}?[?g?t?H???Łu???????H???u???Ď??A????ł???V?X?e???v?Ȃǂ??Ă????B

?@???Ђ́A?uKiru?v?uKezuru?v?uMigaku?v???߂̍ŐV?Z?p??A??Ƃ????????I?ɍs?????߂̃V?X?e???ɂ‚??āA???@?ɂ???Ă??s?????B????1?‚??A300mm?E?G?n?[??p???????????C????????????H?????V?X?e???̐V?o?[?W?????ł???B??{?R???Z?v?g??SEMICON 2017?ł??J?????Ă??邪?A?V?o?[?W?????̓X?y?[?X?̗L?????p?Ɣ????ʂ̑????ɑΉ??????V?X?e???ł???B

?@??????H?????V?X?e???́A?_?C?V???O?H???ȍ~?̑??u?ԃE?G?n?[?J?Z?b?g???????A?????????邽?߂̒?Ăł???B????܂ŃI?y???[?^?[???蓮?ōs???Ă?????Ƃɔ?ׂāA?X???[?v?b?g?̌???A???u?ғ????̌???A?q???[?}???G???[?̒ጸ?Ȃǂ????҂ł???Ƃ????B????ŏ????o?[?W?????́A?x???g?R???x???[??????????p???????߁A???????C???ɂ?????t?b?g?v?????g?̑?????????ʕϓ??ւ̑Ή??Ȃǂ??ۑ?ł??????B

?@?V?o?[?W?????ő傫???ς????̂??????????ł???B?E?G?n?[?????p?̃??[???????ݑ??u?㕔??Ԃɐ݂??邱?ƂŁA?V???ȃt?b?g?v?????g?͂قƂ?ǕK?v???Ȃ??A?{?H????r?I?e?Ղ??Ƃ????B?܂??A?E?G?n?[??????AGV???̗p???Ă???A?????o?H??????ʂ?ݒ肷?鎩?R?x?̍??????傫?ȓ????ł???B

?@?u?[?X?ł́A?ݒu???ꂽ?_?C?V???O?\?[5????A??????H?????V?X?e??ver.2?ł‚Ȃ??A?????p?J?Z?b?g??????H?O?̃E?G?n?[?????o???A?G???x?[?^?[???j?b?g???g???Ċe?_?C?V???O?\?[?ɔ??????A???H?I????ɃJ?Z?b?g?֖߂??f?????s?????B

?f???W????????????H?????V?X?e??ver.2?̃C???[?W

?X?}?z?Ő??????H???u?̉ғ??󋵂??Ď?

?@?R???Z?v?g?W???ł???1?’??ڂ???Ă????̂??A?X?}?[?g?t?H???Ȃǂɂ?鐸?????H???u?̊Ď??E????V?X?e???ł???B???ꂽ?ꏊ????A?X?}?[?g?t?H????PC?Ȃǂ̃E?F?u?u???E?U?𗘗p???āA?l?b?g???[?N?ڑ????ꂽ?H????ɂ??镡????̑??u?ɂ‚??āA?ғ??󋵂Ȃǂ??ꊇ???ĊĎ??A???䂷?邱?Ƃ??ł???B????܂ł̂悤?ɓ???????֏o?????A???u?Ɏ??t????ꂽ???j?^?[?ŁA1?䂲?Ɗm?F????K?v???Ȃ??B??p?̒[????\?t?g?E?F?A?̃C???X?g?[?????s?v?ł???B

?@?Ⴆ?΁A?[???????瑕?u?Ƀ??b?Z?[?W?𑗐M????ƁA???̓??e?ɉ????ăl?b?g???[?N?ɐڑ????ꂽ?e???u????A?ғ??󋵂⑕??????Ă???u???[?h?̎?ނƂ??̖??՗ʁA?X?s???h????]???A?E?G?n?[???H?????A?G???[?󋵂Ȃǂ̃f?[?^???A?[?????ɕԑ?????f?B?X?v???C?ɕ\???????Ƃ????B

?@???u???Ƃɏo?????E?G?n?[?J?Z?b?g?̌????w????قȂ鑕?u?Ńu???[?h?????????̃??b?Z?[?W?Ȃǂ??A?قړ????^?C?~???O?Œ[???ɓ͂????ꍇ?ł??A??ƈ??͓????Ɍ???Ń????e?i???X???邱?Ƃ??ł??邽?߁A???????C???̃_?E???^?C?????ɂ߂ď????????邱?Ƃ??ł???B

?X?}?[?g?t?H????PC?Ȃǂɂ?鐸?????H???u?̊Ď??E????V?X?e???̕\????

?r?C??r???ݔ???s?v?ɂ????u?_?C?V???O?\?[?v

?@???̑??A?t???[???????ƃE?G?n?[?????ɂ‚??Ēi???ւ??????邱?ƂȂ??A?{?^??1?‚Ő؂?ւ??邱?Ƃ??ł???300mm?E?G?n?[?Ή??t???I?[?g?}?`?b?N?_?C?V???O?\?[?uDFD6363?v?A?r?C?Ɣr???ݔ????s?v?ȁu?_?C?V???O?\?[?v?A???[?U?[?\?[??p??SiC?i?Y???P?C?f?j?̃C???S?b?h???X???C?X???H???ăE?G?n?[??????S?????V?X?e???uKABRA?Izen?v?ŁA?X???[?v?b?g??E?G?n?[?文???????コ?????ŐV?V?X?e???Ȃǂ??W???????B