???o?C???̍s???x???A?v???????̌??ATED???????x/?n???C?Z???T?[?̔̔??J?n

?@?????G???N?g?????f?o?C?X?iTED?j??2010?N12???A?e??Z???T?[????|???郁???V?b?N?iMEMSIC?j?Ƒ㗝?X?_?????????A???Ђ̍??ϏՌ????̉????x?Z???T?[?ƁA?????x?̒n???C?Z???T?[?̔̔????J?n?????i?}1?j?B

?@?????V?b?N?́A?????????ԍڕ????Ώۂɂ????e??Z???T?[??A?Y?Ɛ??䕪???q??????Ɍ??????i?r?[?Q?[?V?????V?X?e???Ȃǂ??J?????Ă???č???Ƃł???B?{?Ђ͕č??ɂ???A1999?N?ɐݗ????ꂽ?B

?@???݁A?X?}?[?g?t?H???Ȃǃ??o?C???@??̑??ʕ⏕?ɂ́A?n???C?Z???T?[??????x?Z???T?[?????p????Ă???B?n???C?Z???T?[?̓X?}?[?g?t?H?????????Ă?????ʂ????o???A?????x?Z???T?[?͒n???C?Z???T?[?̊???x???𒲐????邽?߂Ɏg???B?n?}?A?v???P?[?V??????s???x???^?̃A?v???P?[?V?????????????錮?ƂȂ?d?v?ȕ??i?ł???B?????G???N?g?????f?o?C?X?́A?p???I?Ȏs??g?傪???҂ł??鐻?i????ƍl???A??舵?????n?߂??B

?}1?@?????G???N?g?????f?o?C?X???̔????J?n?????????x?Z???T?[?ƒn???C?Z???T?[
?č??̃????V?b?N?iMEMSIC?j???J?????????́B?????x?Z???T?[?͔M???m?????A?n???C?Z???T?[??AMR?i?ٕ??????C??R?j???????̗p???Ă???B

?@?????x?Z???T?[?͔M???m???????̗p

?@?????V?b?N?̉????x?Z???T?[?́A?M???m???????̗p???邱?ƂŁA?????ϏՌ????????????Ă???B?M???m?????̉????x?Z???T?[?𐻕i?????Ă???̂́A??Ƀ????V?b?N???????Ƃ????B

?@?M???m?????????x?Z???T?[?̎d?g?݂͂??????BMEMS?iMicro Electromechanical Systems?j?Z?p?ō?荞?񂾋?ԂɃK?X??????????Ă???B???̋?Ԃɒu?????`?b?v?̒??????ɂ̓q?[?^?[??????A?`?b?v?̎l???ɂ͉??x?Z???T?[??????B?????x?Z???T?[????????????‚ɉ??炩?̗͂??????A?ʒu???ψʂ???ƁA??Ԃ̉??x???z???ω?????B?]???āA???x???z?????x?Z???T?[?Ń??j?^?????O????΁A?????x?𑪒?ł???d?g?݂ł???B

?@???݁A?????̊?Ƃ??A?M???m?????ł͂Ȃ??A???o?f?q?̋@?B?I?ȕψʂ??g???āA?????x?𑪒肷???ނ̉????x?Z???T?[?𐻕i?????Ă???B???̎?ނɔ?ׂ?ƁA?M???m?????̉????x?Z???T?[?͑??莞?Ƀq?[?^?[?𓮍삳????K?v??????A?ғ????̏???d?????傫???Ȃ??Ă??܂??B

?@???????A?@?B?I?ɕψʂ???f?q??L???Ă??Ȃ????߁A?????܂?????߂₷???A?@?B?I?ȏՌ??ɑ΂???ϐ????????B?u?????܂?????߂₷?????߁A???o?f?q?̋@?B?I?ȕψʂ??g???????x?Z???T?[?ɔ?ׂāA?????ł???B?܂??A50kG?̏Ռ??ɑς?????v?i???Ёj?B???ݔ̔????Ă???̂́A2???iX????Y???j?̉????x?Z???T?[?????A????A3???̕i??????i??????\??ł???B

?@?????x?ƒ????d?͂𗼗?

?@?????3???n???C?Z???T?[?́AAMR?i?ٕ??????C??R?j???????̗p???Ă???B???ݕ??y???Ă???z?[???f?q???g???????C?Z???T?[??ׁA???????x?Ə???d?͂̒Ⴓ?𗼗??????Ă??邱?Ƃ????????Ƃ????B??̓I?ɂ́A???萸?x?́}2???A????d????0.55mA?i1?b??50??Z???V???O?????Ƃ??j?B3?‚?AMR?f?q??13?r?b?g????\??A-D?ϊ??`?b?v?ō\?????Ă???A???芴?x??1LSB?iLeast Significant Bit?j??2mG?ł???B

?????????????L?????o???A?????x?Z???T?[?̎d?g?݂???????镔???ɂ????āA?u???̋?Ԃɒu??????‚̒??????ɂ̓q?[?^?[??????A??‚̎l???ɂ͉??x?Z???T?[??????B??‚ɉ??炩?̗͂??????A?ʒu???ψʂ???ƁA??Ԃ̉??x???z???ω?????B?v?Ɛ??????Ă??܂????B??????????\???????????߁A?u???̋?Ԃɒu?????`?b?v?̒??????ɂ̓q?[?^?[??????A?`?b?v?̎l???ɂ͉??x?Z???T?[??????B?????x?Z???T?[????????????‚ɉ??炩?̗͂??????A?ʒu???ψʂ???ƁA??Ԃ̉??x???z???ω?????B?v?ƒ????v???܂????B?{?L???́A???łɒ????ς݂ł??B